Product Introduction

Application Scope:
Wafer Cassettes, FOUPs, Wafer Automated Handling Robots, Wafer Calibration Equipment, Load Locks, Wafer Ejectors, Process Chamber Bases, Overhead Crane Handling Systems, Wafer Loading and Detection Integrated Devices (SMIF)

Product Advantages

1. 1、Wireless Temperature Measurement & Data Collection: Sensors transmit data without wired connections, enabling parameter measurement via wireless communication in complex wafer conditions.

2. 2、Multi-parameter Real-time Data Monitoring: AVLS professionally measures key parameters such as acceleration, vibration, levelness, and leveling angle during wafer processing.

3. 3、High Precision & Sensitivity: Sensors meet strict industrial standards and requirements with high precision and sensitivity.

4. 4、Supports Process Adjustment & Verification: Analyzes parameters collected under actual process conditions to adjust process steps for optimal performance.

5. 5、Lightweight Design: The lightweight AVLS system adapts to more equipment and application environments, offering flexibility and convenience, especially in space-constrained scenarios.

6. 6、Low Power Consumption: The low-power feature ensures long-term operation without compromising performance.